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NEW ELECTRON BEAM LITHOGRAPHY SYSTEM USED IN JET PROPULSION LABORATORY
PASADENA, USA, The researches at Nasa's Jet Propulsion Laboratory are using an electron beam on the submolecolar scale for the creation of microscopic sensor for future spacecrafts and aircrafts. The new Japanese-built electron beam lithography system costed 5 USDm and will lead someday to significant mass and cost reductions in space and flight future vehicles.
AVIONEWS - World Aeronautical Press Agency